EUV is done by a laser going through a droplet of tin. as per ASML site:
In our laser-produced plasma (LPP) source, molten tin droplets of around 25 microns in diameter are ejected from a generator at 70 meters per second. As they fall, the droplets are hit first by a low-intensity laser pulse that flattens them into a pancake shape. Then a more powerful laser pulse vaporizes the flattened droplet to create a plasma that emits EUV light. To produce enough light to manufacture microchips, this process is repeated 50,000 times every second.
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u/granite-barrel 23h ago
Microscopic is almost underselling it, they're practically at the atomic level at this point